÷ºÎ ÆÄÀÏ : (PCD¼öÄ¡.jpg)
÷ºÎ ÆÄÀÏ : (NPGS beam current.jpg)
¾È³çÇϼ¼¿ä ¼°´ëÇб³ ³ª³ëÆÕ¼¾ÅÍ À¯ÁöÇýÀÔ´Ï´Ù. FE-SEMÀº 7100Fº¸À¯ÇÏ°í ÀÖ°í NPGSµµ ¼³Ä¡µÇ¾îÀÖ½À´Ï´Ù. NPGS»ç¿ë Áß ±Ã±ÝÇÑ Á¡ ÀÖ¾î ¹®Àǵ帳´Ï´Ù. beam current¸¦ ÃøÁ¤ÇÔ¿¡ ÀÖ¾î PCD¸¦ »ç¿ëÇÏ¿© ÃøÁ¤ÇÑ °ª(»çÁø1)°ú NPGS ÇÁ·Î±×·¥»ó¿¡¼ Àç´Â °Í(»çÁø2)°ú Â÷ÀÌ°¡ ÀÖ¾î ¾î¶² °ÍÀÌ ¸Â´ÂÁö ¹®Àǵ帳´Ï´Ù. Æ÷Ä¿½º¸¦ ¸ÂÃß°í ³ª¼ PCD¸¦ ³Ö¾î ÀîÀ»¶§´Â 45pA°¡ ³ª¿Ô°í, NPGS ÇÁ·Î±×·¥»ó¿¡¼ beam current¸¦ ´·¯ Àç¸é 104pA°¡ ³ª¿Í¼ ÃøÁ¤¹æ¹ýÀÌ ´Ù¸¥ °ÍÀÎÁö, ±×¸®°í ÇÁ·Î±×·¥ run file editor¿¡¼ beam current¸¦ Àû´Â ºÎºÐ¿¡ µÑ Áß ¾î¶² °ªÀ» ³Ö¾î¾ßÇÏ´Â Áö ¹®Àǵ帳´Ï´Ù. ´äº¯Àº À̸ÞÀÏ·Î ºÎŹµå¸³´Ï´Ù. °¨»çÇÕ´Ï´Ù. À¯ÁöÇýµå¸²
|